Factory Transfer: 2 High-Configuration Optorun OTFC-1550/1800 Vacuum Coating Machines

Equipment Dimensions:

Equipment Name: OTFC-1550CBI/DBI

Vacuum Chamber: SUS304, φ1550mm×1800mm (H)

Workpiece Holder: φ1400mm

Workpiece Holder Rotation Speed: 10rpm to 30rpm (Variable)

Optical Thickness Control: HOM2-R-VIS350A Optical Thickness Monitor

Wavelength Range: 350nm to 1100nm

Reflective/Transmissive

Crystal Thickness Gauge: XTC/3+6-Point Crystal Sensor

Evaporation Source: 2 Sets of Electron Guns

Ion Source: 17cm RF Ion Source

Sales Technical Manager Yang: 18103045976

Mechanical Performance:

Exhaust System: Mechanical Pump + 2 Diffusion Pumps + Polycold (or 2 Cryopumps)

Ultimate Pressure: Below 7.0×10??Pa

Pump-Down Time: 15 Minutes (Atmospheric Pressure to 1.3×10?3Pa)

Substrate Temperature: Maximum 350℃

Working Conditions:

Equipment Dimensions: Approximately 5500mm(W)×7200mm(D)×3700mm(H)

Power Supply: 3-Phase, 200V, 50/60Hz, Approximately 120KVA

Water Flow Rate: 180 Liters/Minute or More

Air Pressure: 0.5MPa or More

Weight: Approximately 10000kg

Applicable for Various Optical Thin Film Deposition Systems, Including LED Optical Films, ITO Films, Anti-Reflection Films, and Multi-Layer Films